Substrate Surface Macro Inspection Device 'Stealth300V Series'
Comprehensive substrate inspection with high sensitivity and speed.
The "Stealth300V Series" is a device that captures the reflected/scattered light from the surface of substrates/membranes illuminated by an LED line using a super-sensitive camera, allowing for the analysis of their surface conditions. It enables high-speed inspection of overall trends in substrates that could not be detected by conventional localized (micro) inspections. It has a proven track record in inspecting film uniformity, exposure uniformity, and surface scratches in OLEDs and semiconductors. Additionally, by equipping a fine surface foreign matter inspection optical system option, it is also capable of detecting foreign matter equivalent to PSL 0.3um. 【Features】 ■ High-speed, comprehensive measurement ■ High-sensitivity imaging ■ Easy maintenance ■ Customizable inspection software to meet customer specifications
- Company：東朋テクノロジー
- Price：Other
